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Endura 5500 Part List

Pre Clean (RF Etch)
Part Number Picture Part Name Size
0040-21178 Quart'z Bellar (AL2O3) 368*130
0020-26588 PC2 Shield 328*51
- Gas Trench Cover 344*6
0020-24434 Pedestal 190*9
0020-22844 Pedestal Shield 225*4
- Ceramic Insulator 229*21
0015-20124 Ti Pedestal Screw N/A
3690-02569 Ti Shield Screw N/A

Endura 5500 Part List

TiW Deposition
Part Number Picture Part Name Size
0020-23278 Upper Shield 357*65
0020-23277 Lower Shield 340*54
0021-22028 Pedestal 235*8
0020-24914 Cover Ring 269*27
0020-23041 Clamp Ring 359*17
0020-21901 Braket N/A
- Restbution & Washer N/A

Endura 5500 Part List

Au Deposition
Part Number Picture Part Name Size
0020-23278 Upper Shield 357*65
0020-23277 Lower Shield 340*54
0021-22028 Pedestal 235*8
0020-24914 Cover Ring 269*27
0020-23041 Clamp Ring 359*17
0020-21901 Braket N/A
- Restbution & Washer N/A
ASP+ Chamber 도면 요청물 (To EGT)
Part Number Picture Remarks
0040-09661(CH.D)
0040-09662(CH.C) 		-
0020-10187 -
0020-31409 -
0020-31763 -
0020-09135 -
0040-09574 -
0040-09627 -
0020-31554 -
0040-09663 -
0040-09845 -
0040-09434 -
0040-09401 -
0020-31126 -
0040-09404 -
0040-09403 -
0040-09402 -
0040-09439 -
0020-31519 -
0020-09414 -
0040-35483 -
0040-09584 -
0020-31480 -
0020-31772 -
0010-76700 -
0020-30977 -
0040-09525 -
0020-31260 -
0040-09115 -
3370-01053 -
0020-31122 -
0021-35819 -
0021-35822 -
0021-10589 -
0040-09558 -
0040-32136 -
0140-09122 -
0040-09630 -
0040-09632 -
0040-09631 -
0040-09629 -
0020-31857 -
0020-31771 -
0040-35482 -
0040-09684 -
0040-09771 -
0040-35481 -
0040-09772 -
0040-09681 -
0020-31805 -
0050-10047 -
0050-10033 -
3300-01904 -
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TxZ CH# Part's List
Part Number Picture Remarks
0021-09760 REV. A -
0021-35867 P4 -
WT08-SMT-121-00 -
WT08-SMT-124-00 -
WT08-SMT-125-00 -
WT08-SMT-128-01 -
WT08-SMT-131-01 -
WT08-SMT-130-03 -
WT08-SMT-129-01 -
WT08-SMT-133-00 -
txz chamber -
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